微光机电系统(MOEMS)和微纳光学方面,包括:基于MEMS技术的非制冷红外探测器,微偏振片阵列传感器及分焦平面偏振成像技术研究,微纳超表面光学及其在传感、成像领域的应用。
半导体加工技术的进步为创建功能各异的MEMS微型传感器提供了强大的手段,包括温度传感器、磁场传感器、压力传感器、加速度传感器、气体传感器和图像传感器等。在众多MEMS传感器中,有一种特殊的图像传感器叫做“红外探测器”,它可以“看到”红外线,扩展人类的视觉范围,让人类做到“见所未见”。我们的研究聚焦于MEMS红外探测器的设计、制备、性能及应用探索。
另外,由于不同物质对光的吸收和反射呈现出不同的光谱特征峰(即波长),同时反射光谱会携带由其自身性质决定的偏振信息,如粗糙度、含水量以及材料的理化特性等。因此,在提高目标识别和鉴定能力的需求驱动下,我们进一步开展了能够提供多色探测和偏振探测等功能的红外探测器研究,如基于碳纳米管的微偏振片阵列、基于超表面光学的多色超透镜、微偏振片阵列和超透镜与红外探测器的集成光学以及相应的成像算法。
代表性研究成果
1.Yi, Yanji, et al. "A demosaicking method based on an inter-channel correlation model for DoFP polarimeter." Optics and Lasers in Engineering 181 (2024): 108388.
https://www.sciencedirect.com/science/article/pii/S014381662400366X
2.Zhang, Peng, et al. "High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film." Journal of Microelectromechanical Systems (2024).
https://ieeexplore.ieee.org/abstract/document/10500410 PDF 文件
3.Luo, Zhendong, et al. "Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens." Physica Scripta 99.1 (2023): 015510.
https://iopscience.iop.org/article/10.1088/1402-4896/ad1235/meta PDF 文件
4.Zhang, Hui, et al. "Pixelated Micropolarizer Array Based on Carbon Nanotube Films." Nanomaterials 13.3 (2023): 391.
https://doi.org/10.3390/nano13030391 PDF 文件
5.Zhang, Hui, et al. "Investigation and optimization of polarization properties of self-assembled carbon nanotube films." Nanotechnology 33.19 (2022): 195702.
https://iopscience.iop.org/article/10.1088/1361-6528/ac4d56/meta PDF 文件
6.Zhang, Yiyuan, et al. "Digital-image-correlation-based thermomechanical diagnostics of Bismuth Telluride pillars in a thermoelectric cooler." Optics and Lasers in Engineering 151 (2022): 106905.
https://doi.org/10.1016/j.optlaseng.2021.106905 PDF 文件
7.Hou, Huwang, et al. "Design and fabrication of monolithically integrated metalens for higher effective fill factor in long-wave infrared detectors." Optics and Lasers in Engineering 150 (2022): 106849.
https://doi.org/10.1016/j.optlaseng.2021.106849 PDF 文件
8.Zhang, Peng, et al. "Highly aligned carbon nanotube‐based bi‐material microactuators with reduced intertube slipping." ChemNanoMat 6.3 (2020): 404-411.
https://doi.org/10.1002/cnma.202000029 PDF 文件